TY  - JOUR
A1  - Levitin, G 
A1  - Myneni, S 
A1  - Hess, D W
T1  - Reactions between CO2 and tetramethylammonium hydroxide in cleaning solutions.
Y1  - 2003//
N1  - R829554
JF  - ELECTROCHEMICAL AND SOLID STATE LETTERS
J1  - ELECTROCHEM SOLID ST
VL  - 6
IS  - 8
SP  - G101
EP  - G104
ER  - 


TY  - JOUR
A1  - Levitin, G 
A1  - Bush, D 
A1  - Eckert, C A
A1  - Hess, D W
T1  - Phase behavior and modeling of CO2/methanol/tetramethylammonium bicarbonate and O2/methanol/tetramethylammonium bicarbonate/water mixtures at high pressures.
Y1  - 2004//
N1  - R829554
JF  - JOURNAL OF CHEMICAL ENGINEERING & DATA
VL  - 49
IS  - 3
SP  - 599
EP  - 606
ER  - 


TY  - JOUR
A1  - Levitin, G 
A1  - Myneni, S 
A1  - Hess, D W
T1  - Post plasma etch residue removal using CO2-TMAHCO(3) mixtures: Comparison of single-phase and two-phase mixtures
Y1  - 2004//
N1  - R829554
JF  - JOURNAL OF THE ELECTROCHEMICAL SOCIETY
J1  - J ELECTROCHEM SOC
VL  - 151
IS  - 6
SP  - G380
EP  - G386
ER  - 


TY  - JOUR
A1  - Levitin, G 
A1  - Hess, D W
T1  - Ionic conductivity of elevated pressure TMAHCO(3)/MeOH/CO2 mixtures
Y1  - 2005//
N1  - R829554
JF  - ELECTROCHEMICAL AND SOLID STATE LETTERS
J1  - ELECTROCHEM SOLID ST
VL  - 8
IS  - 1
SP  - G23
EP  - G26
ER  - 


TY  - JOUR
A1  - Myneni, S 
A1  - Hess, D W
T1  - Post-plasma-etch residue removal using CO2-based fluids
Y1  - 2003//
N1  - R829554
JF  - JOURNAL OF THE ELECTROCHEMICAL SOCIETY
J1  - J ELECTROCHEM SOC
VL  - 150
IS  - 12
SP  - G744
EP  - G750
ER  - 


TY  - JOUR
A1  - Myneni, S 
A1  - Peng, H-G 
A1  - Gidley, D W
A1  - Hess, D W
T1  - Compatibility of High Pressure Cleaning Mixtures with a Porous Low Dielectric Constant Film: A positronium Annihilation Lifetime Spectroscopic Study.
Y1  - 2005//
N1  - R829554
JF  - JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
J1  - J VAC SCI TECHNOL B
VL  - .23(4)
SP  - 1463 
ER  - 


TY  - JOUR
A1  - Myneni, S 
A1  - Hess, D W
T1  - Post plasma etch residue removal using CO2-based mixtures: Mechanistic considerations
Y1  - 2005//
N1  - R829554
JF  - JOURNAL OF THE ELECTROCHEMICAL SOCIETY
J1  - J ELECTROCHEM SOC
VL  - 152
IS  - 10
ER  -